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Inficon UL3000 Fab ULTRA - Page 117

Inficon UL3000 Fab ULTRA
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INFICON Cleaning and maintenance | 8
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 117 / 152
Table3:
Capillary filter
1 Sniffer line end 4 Plastic capillary filter
2 cone seal 5 Water conservation tip
3 Metal capillary filter
Capillary filter and water conservation tip are screwed onto the sniffer line end. The
filter inserts are inserted and lie in front of a small metal grill that is also inserted.
To replace the filter inserts, proceed as follows:
1
Switch off the leak detector.
2
Unscrew the capillary filter or the water conservation tip. Make sure that the
cone seal does not fall out.
3
Push out the old filter pads and the metal grill from the rear.
Fig.18:
Pressing the filter inserts out of the capillary filter
4
Dispose of the old inserts and clean the metal grill.
5
Push the metal grill and then the two new inserts into the filter from the front.
Make sure that grill and inserts do not cant.
6
Switch on the leak detector.
7
Close the sniffer probe with your finger. With the water protection tip, you have
to also cover the opening on the side. You should then be able to feel a
negative pressure. If not then there is a leak somewhere and you have to check
the screw connection. The cone seal may also have fallen out.

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