Inficon UL3000 Fab ULTRA - 6.5 Measuring helium ambient concentration; 6.6 Measurement data

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6.5 Measuring helium ambient concentration
The natural content of helium in the ambient air is about 5.2 ppm.
You can examine the ambient air for an increased helium content (helium
contamination) to determine the appropriate time for further measurements.
ü The operation mode "Vacuum" is set.
ü The gas chosen is “helium“
4
He. See also "Select gas [}67]".
ü There are no long hoses connected to the "purge gas connection". There, the air
enters the device whose helium concentration is measured. See also "Connections
for accessories and control signals [}31]".
ü The device is in the "Standby" state.
1
Select the cross-hair icon .
2
Select “I•CHECK“.
3
Press .
4
View the measurement result.
6.6 Measurement data
You can record measured values in the internal database. Recording can be done
automatically during the measurement or via the "Record measurement data" button
in the measurement screen.
See also "Switch on data recording and configure export [}81]".
You can also export the displayed measured values.
See also "Display measurement cycles [}82]".
For the export you can either use a USB flash drive or the network connection, see
also “Export measurement data via network [}83]”.
6.6.1 Switch on data recording and configure export
NOTICE
Reduces the service life of the memory
The recording of many measured values reduces the service life of the internal
memory.
► Disable data recording when you no longer need it.
ü
Operator
or
Supervisor
rights
1
> Setup > Data recording