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General| Type | Helium Leak Detector |
|---|---|
| Detection Method | Mass Spectrometer |
| Accuracy | ±10% of reading |
| Operating Humidity | 10% to 90% RH (non-condensing) |
| Detectable Gases | Helium |
| Minimum Detectable Leak Rate (Helium) | 5 x 10-12 mbar l/s |
| Sensitivity | 5 x 10-12 mbar l/s |
| Test Port Pressure | Up to 15 mbar |
| Response Time | Less than 1 second |
| Operating Temperature | 10°C to 40°C |
| Power Requirements | 100-240 VAC, 50/60 Hz |
| Communication Interfaces | RS-232, USB, Ethernet |
| Applications | Semiconductor |
| Measurement Range | 1 x 10⁻¹² to 1 x 10⁻² mbar·l/s |
Manual intended for operators and technical specialists.
Explanation of danger, warning, caution, and notice levels.
Defines terms like 'helium' and 'hydrogen' usage.
Defines the device's purpose and lists misapplications.
Operator responsibilities regarding manual and safety.
Requirements for companies and personnel regarding safe operation.
Details dangers from electric power, explosion, suction, and bursting objects.
Lists items included with the device.
Instructions for safely transporting the device.
Guidelines for storing the device.
Explains the leak detector's purpose and methods.
Introduces Vacuum, Sniffing, and Auto Leak Test modes.
Overview of device setup and components.
Lists detailed technical specifications of the device.
Lists the default configuration settings.
General setup instructions and safety precautions.
Instructions for attaching device accessories.
Mounting the bracket for the sniffer line.
How to connect the device to power.
Steps to verify the device is working correctly.
Steps and precautions for switching on the device.
Overview of initial device configuration.
Configuration options for measurements.
Step-by-step guide for performing measurements.
Measuring ambient helium levels.
Managing and exporting measurement data.
Accessing device and measurement information.
Accessing device logs.
Managing device configuration parameters.
Instructions for updating device software.
Connecting and using an external monitor.
Displaying the vacuum system diagram.
Restoring device to factory default settings.
How to log out of the device.
Procedures for safely switching off the device.
Explains warning messages and their handling.
Explains error messages and their handling.
Shows where to view active errors/warnings.
Shows acknowledged but unrectified warnings.
Where to find an overview of errors/warnings.
Handling voltage supply issues.
Instructions for cleaning the device housing.
Steps to replace the filter mat in the tool box.
Steps to replace the filter mat on the device bottom.
Steps to replace the SL200 sniffer line filter.
Steps to replace SL3000 sniffer line filter.
How to save screen captures to a USB stick.
Information on sending the device for service.
Overview of scheduled maintenance tasks.
Proper disposal instructions for the device.
Procedures for sending the device for service.
List of available accessories and part numbers.
Details on the Helium bottle holder accessory.
Information on remote controls.
Information about the TC1000 test chamber.
Information on the I/O module.
Information on bus modules.
Network configuration and operation.
Operating the device via web browser using LAN.
Operating the device via web browser using WLAN.
Overview of menu navigation paths.
Paths for diagnostic functions.
Paths for various setting menus.
Paths to access device information.
CE conformity statement.
TÜV Rheinland certification document.
Restriction of Hazardous Substances compliance.
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