UL3000 Fab ULTRA

Page 2

Inficon UL3000 Fab ULTRA - Page 2

Inficon UL3000 Fab ULTRA

152 pages

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INFICON GmbH

Bonner Strasse 498

50968 Cologne, Germany

Table of Contents

Table of Contents3
About this Manual8
Target Groups8
Warnings8
Definition of Terms8
Safety11
Intended Use11
Duties of the Operator13
Owner Requirements13
Dangers14
Scope of Delivery, Transport, Storage15
Description18
Function18
Operation Modes18
Operation Mode "Vacuum18
Operation Mode "Sniffing19
Operation Mode "Auto Leak Test20
Device Setup20
Overall Device20
Control Unit23
START Button24
STOP Button25
ZERO Button25
Meaning of the Button Leds26
Meaning of the Status LED27
Assembly of the Touchscreen27
Vacuum Connections29
Inlet29
Exhaust30
Purge Gas Connection30
Venting Connection30
Connections for Accessories and Control Signals31
Markings on the Device32
Technical Specifications32
Factory Settings34
Installation38
Setup38
Connect the Supplied Accessories42
Fastening Bracket for Sniffer Line SL3000 (Accessory, Optional)48
Connecting to the Power Supply System49
Checking the Operation of the Device49
Operation51
Switching on51
Basic Settings52
Set Language on the User Interface52
Setting Date, Time and Time Zone52
User Profile Settings52
Overview of Rights Groups52
Select, Modify, Create User Profile53
Modify Personal Settings54
Switch off Automatic Login54
Switch on Automatic Login55
Presentation of the Measurement Screen55
Changing the Presentation of the Line Graph56
Changing the Presentation of the Bar Graph57
Changing the Presentation of the Circle Graph58
Change General Display Settings58
Result Display of the Auto Leak Test59
Change Units59
Change Audio Settings60
Change the Protection Settings61
Set Maintenance Interval "Filter Sniffer Tip" or "Air Filter63
Activate or Deactivate Maintenance Requests63
Activating or Deactivating Calibration Requests64
Extending or Reducing Operation Options64
Use Favorites65
Turn Notifications on or off65
Settings for the Measurements67
Select Operation Mode67
Select Gas67
Setting Setpoints67
Activate Vacuum Ranges68
Set Auto Leak Test68
Consider the Background of the Test Chamber69
Hydro•S69
Set HYDRO•S69
Use HYDRO•S70
Setting the Machine Factor70
Set External Calibration Leak71
Change Pressure Limits71
Set and Use the Function ZERO72
Vent, Purge, Regenerate73
Change Leak Rate Filter75
Change Background Suppression75
Determine the Background of the Inlet Area76
Change SL3000 Settings for Sound / Light76
Change the Sniffer Line Pressure Monitoring77
Calibrating77
Internal Calibration78
External Calibration78
Check Calibration78
Measure Internal Calibration Leak79
Measuring80
Measuring Helium Ambient Concentration81
Measurement Data81
Switch on Data Recording and Configure Export81
Display Measurement Cycles82
Export Measurement Data Via Network83
Measurement Data Database: Information84
Information85
Call the Latest Information to the Current Measurement Value85
Call the Latest Information to the Current Calibration Value85
Information on Connected Accessories85
Retrieve Information about the Device86
Call Information on the Assemblies86
Call the Energy Data Information86
Call Information on the HYDRO•S87
Call Information on the SL3000 Sniffer Line87
Log87
Call the Error and Warning Log87
Call Calibration Log87
Call Maintenance Log87
Call Result Log87
Device Settings88
Viewing and Customizing Individual Parameters88
Saving and Managing Sets of Parameters88
Exporting or Importing Sets of Parameters89
Updating the Software89
Update the User Interface Software90
Updating the Software of the Basic Unit90
Update the Software in Expert Mode91
Use External Monitor91
Switch Back to the Internal Monitor92
View Vacuum Diagram92
Resetting to Factory Settings93
Logging off from the Device93
Switching off the Device94
Warning and Error Messages95
Warning and Error Messages UL3000/UL600096
Cleaning and Maintenance112
Cleaning the Housing112
Change the Filter Mat Inside the Tool Box112
Replacement of the Filter Mat on the Bottom of the Device113
Replacing the SL200 Sniffer Line Filter115
Replacing the SL3000 Sniffer Line Filter116
Creating Screenshots118
Sending for Repair or Maintenance119
Maintenance Plan120
Decommissioning the Measuring Instrument122
Disposing of the Device122
Sending in the Device122
Accessories and Interfaces124
Accessories and Spare Parts124
I/O Module128
Create a Connection between the Device and the I/O Module128
Configuring Analog Outputs128
Configure Digital Inputs130
Configuring Digital Outputs131
Setting up the I/O Module Protocol133
Bus Module133
Creating a Connection between the Device and the Bus Module134
Setting a Bus Module Address134
Network135
Operate Leak Detector Via Web Browser (LAN)135
Configure the LAN Connection of the Leak Detector135
Setting the LAN Connection in the PC or Tablet136
Allow Client Access136
Operate Leak Detector Via Web Browser (Wireless LAN)137
Configure the Wireless LAN Connection of the Leak Detector137
Setting the Wireless LAN Connection in the PC or Tablet138
Allow Client Access139
Appendix140
Menu Path140
Diagnostics140
Settings140
Information142
CE Declaration of Conformity143
Certificate (TÜV Rheinland)144
Rohs145
Index147

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