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Inficon UL3000 Fab ULTRA - Table of Contents

Inficon UL3000 Fab ULTRA
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INFICON Table of Contents
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) iii
Table of Contents
1 About this manual.............................................................................................................................................8
1.1 Target groups ...........................................................................................................................................8
1.2 Warnings...................................................................................................................................................8
1.3 Definition of terms.....................................................................................................................................8
2 Safety .............................................................................................................................................................11
2.1 Intended use ...........................................................................................................................................11
2.2 Duties of the operator .............................................................................................................................13
2.3 Owner requirements ...............................................................................................................................13
2.4 Dangers ..................................................................................................................................................14
3 Scope of delivery, Transport, Storage............................................................................................................15
4 Description......................................................................................................................................................18
4.1 Function ..................................................................................................................................................18
4.2 Operation modes ....................................................................................................................................18
4.2.1 Operation mode "Vacuum" .........................................................................................................18
4.2.2 Operation mode "Sniffing"........................................................................................................... 19
4.2.3 Operation mode “Auto Leak Test”............................................................................................... 20
4.3 Device setup ...........................................................................................................................................20
4.3.1 Overall device .............................................................................................................................20
4.3.2 Control unit.................................................................................................................................. 23
4.3.2.1 START button ....................................................................................................................24
4.3.2.2 STOP button ......................................................................................................................25
4.3.2.3 ZERO button ......................................................................................................................25
4.3.2.4 Meaning of the button LEDs...............................................................................................26
4.3.2.5 Meaning of the status LED.................................................................................................27
4.3.2.6 Assembly of the touchscreen .............................................................................................27
4.3.3 Vacuum connections................................................................................................................... 29
4.3.3.1 Inlet ....................................................................................................................................29
4.3.3.2 Exhaust ..............................................................................................................................30
4.3.3.3 Purge gas connection ........................................................................................................30
4.3.3.4 Venting connection.............................................................................................................30
4.3.4 Connections for accessories and control signals........................................................................ 31
4.3.5 Markings on the device...............................................................................................................32
4.4 Technical specifications..........................................................................................................................32
4.5 Factory settings ......................................................................................................................................34
5 Installation ......................................................................................................................................................38

Table of Contents