INFICON Cleaning and maintenance | 8
UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 121 / 152
To the Kashiyama NeoDry backing pump
When pumping clean gases such as dry air and inert gases, the recommended
schedule for preventive maintenance is 3 years.
When pumping condensable gases such as water vapour and gas-mixed solvents as
well as aggressive or corrosive gases, it may be necessary to reduce the maintenance
interval to one year.
The recommendation is made to maintain the technical specifications of the pump
specified by the manufacturer throughout the life of the device. Lack of maintenance
will not normally result in a sudden failure of the pump. Due to wear, pressure
performance will decrease over time.
As long as the pressure performance is suitable for the customer application, the
replacement interval can be changed according to the customer's request.
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