10 | Accessories and interfaces INFICON
132 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
Function State: Description
Off (open) open: always open
Ready for operation closed: Emission switched on, calibration process
inactive, no error
open: Emission switched off or calibration process
active or error
Emission on closed: Emission switched on
open: Emission switched off
Error closed: Error
open: No error
Error or warning closed: Error or warning
open: No error or warning
Run-up closed: Run up
open: no run-up
Calibration request closed: No external calibration: Calibration required
When external calibration or "CAL check":
Request "Open or close external calibrated
leak"
open: No request: Calibration not required
Calibration active closed: Device is to be calibrated.
open: Device is not to be calibrated.
Calibration stable closed: Calibration completed with calibration leak
open: Assignment not stable or calibration is
inactive
Cathode 2 closed: Cathode 2 is active
open: Cathode 1 is active
Measuring closed: Measuring (ZERO is possible, all setpoint
outputs switch depending on the leak rate.)
open: Standby or emission disabled (ZERO is not
possible, all setpoint outputs will return
"Leak rate threshold value exceeded".)
Open open: always open
Sniff closed: Operation mode Sniffing active
open: Operation mode Vacuum active
Setpoint 1 closed: Measured leak rate exceeds the setpoint 1
open: Measured leak rate undercuts the setpoint 1
Setpoint 2 closed: Measured leak rate exceeds the setpoint 2
open: Measured leak rate undercuts the setpoint 2
To Next Page
Loading...