Inficon UL3000 Fab ULTRA - Page 33

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Physical data
UL3000 Fab ULTRA
Minimum detectable leak rate, vacuum
mode
5·10
-12
mbar l/s
Response time, blind-flanged <1s
Maximum inlet pressure (Vacuum range
MASSIVE)
Ambient pressure
Helium pumping speed (Vacuum range
ULTRA)
4l/s
Air suction capacity of the backing pump 36 m
3
/h
Time to 1 mbar for 50 l volume ~ 49 s
Run-up time <3min
Detectable masses
4
He, H
2
, Mass 3 (e.g. H-D,
3
He or H
3
)
Minimum detectable leak rate, sniffer
mode
< 5 x 10
-8
mbar l/s
Gas flow through sniffer line SL200 25sccm
Gas flow through sniffer line SL3000 160sccm
Measurement range 12 decades
Sound pressure level in Standby < 70 dB (A) *)
Ion source 2 long-life iridium cathodes, Yttrium oxide
coated
*) The A-weighted emission sound pressure level at the operator's premises is less
than 70 dB (A) at all times for all foreseeable uses of the device. The noise emission
measurement declaration was drawn up in accordance with the harmonized standard
DIN EN ISO 3744:2011.
Ambient conditions
UL3000 Fab ULTRA
Max. altitude above sea level 2000m
Maximum relative humidity 80 % at 30 °C, linear decrease to 50% at
40 °C
Storage temperature 0°C … +50°C
Ambient temperature +10°C … +40°C
Degree of contamination **) 2
**) According to DIN EN 61010-1: Only non-conductive contamination. Occasionally,
temporary conductivity may occur due to condensation.