Inficon UL3000 Fab ULTRA - Page 50

5 | Installation INFICON
50 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
ð After switching on pieces of status information are shown on the touchscreen
about the speed of the turbo molecular pump, the foreline pressure, the
emission and the active cathode. The start process takes about 3 minutes
and is completed with a short acoustic signal. Now, the device is in the
"Standby" mode (ready to operate).
5
Press the STARTbutton.
ð The inlet is evacuated and then the measuring mode for the measured leak
rate is shown.
In case a test object was connected, you would start with spraying helium on
the outside.
6
In case you would like to suppress any possible existing background signals
(helium background in the test object) press the ZERObutton.
In order to reverse the background suppression press the ZERO button on the
control panel for 2 - 3 seconds, see "ZERO button [}25]”.
7
Press the Stopbutton.
ð The device switches to the "Standby" mode.
If you press the Stop button on the control panel for a few seconds the inlet of
the device is ventilated.
8
If you want to end the test now you can switch off the device.
9
If you want to check the internal calibration wait, for getting a better quality of
measurement results, 15 to 20 minutes until the device has warmed up.
10
To call the calibration menu press on the cross hair icon .
11
Select “Internal“.
12
Press the button.
ð The automatic internal calibration starts and requires approx. 30 seconds.
13
If you want to check the measurement accuracy of the device using the optional
helium calibration leak remove the blank flange from the inlet and connect an
open helium calibration leak onto the inlet.
14
Press the STARTbutton.
ð The inlet is evacuated and the leak rate of the test object is measured and
displayed.
15
Press the Stopbutton to interrupt the measurement.
ð The leak detector changes into the "Standby" mode.
16
Press the Stop button on the housing until the message STANDBY/VENTED
appears on the display.
ð The inlet is now in the vented state.
17
Separate the helium calibration leak from the inlet and flange the inlet blind
again.
18
Switch off the device via the power supply switch.