Troubleshooting
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Troubleshooting
If negative pressure abnormality occurs
By the environment or aging, the pressure controlled in this machine may exceed the control range.
If an error related to pressure abnormality occurs, perform the procedures below:
1
Select [PRESSURE ADJUST] of the maintenance menu.
(1) Press the key in LOCAL.
(2) Press to select [MAINTENANCE] and press the key.
(3) Press to select [PRESSURE ADJUST].
2
Press to select POSITIVE or NEGATIVE.
3
Press the key.
4
Rotate the adjustment screw of the throttle valve to release it so that air can flow.
• Rotate it until the adjustment screw of the throttle valve comes to the middle position.
5
Press the key.
• Sensor adjustment starts.
6
Rotate the adjustment screw of the throttle valve to
adjust the pressure so that it becomes the proper
value.
• Proper value of negative pressure: -2.70kPa
Proper value of positive pressure: 15.00kPa
• As the negative pressure changes between ±0.1 and 0.2kPa, adjust so that the intermediate value may
become the target pressure.
• Adjust the throttle valve in order of “negative pressure” “positive pressure” “negative pressure”.
• If pressure abnormality occurs, immediately adjust the pressure with the following procedures and
return it to the normal value.