Ulvac RFP-N - Page 17

RF POWER SUPPLY and MATCHINGBOX
2. Overview
9
Table 2-5 RFS-1330N specifications
Classification
Item
Specification value
RFS-1330N
Input
Input frequency
Three-phase 50 to 60 Hz
Input voltage
200 to 220 VAC
Fluctuation range
Rated voltage ±10% (180 to 242 VAC)
Input capacity
Approx. 5 kVA or less
Short circuit interrupting capacity
1000 A
Rated input current
25 A
Input connector
DCA3102E22-22P-D (bayonet-lock round receptacle)
Leakage current
5 mA or less
External OSC input
13.56 MHz ± 0.05%/10 dBm ± 3 dBm/BNC receptacle
Output
Oscillation frequency
13.56 MHz ± 0.01% (internal quartz oscillator)
Rated traveling wave power
3000 W (at 50 Ω load)
Maximum reflected wave power
500 W
Output impedance
50 Ω
Harmonic distortion
-35 dB or lower (continuous mode at rated output/50 Ω load)
Power stability
±2% or lower (rated output/50 Ω load)
Rise time
Minimum 100 ms or lower
Linearity
±2% or less of rated output
Coaxial output connector
HN-type receptacle
Cooling
Cooling method
Forced air cooling by fan/water cooling (4 l/min)
Connector: Rc1/4 (PT1/4) female
Water pressure:0.5MPa.See page 6 for water quality.
Operation mode
Controllable by the control panel and external command
signal.
Insulation resistance
50 MΩ or more with a 500 VDC insulation tester
(between AC_LINE and CASE)
Withstand voltage
1500 VAC (50 Hz/60Hz)/1 minute
(between AC_LINE and CASE)
Ambient operating temperature
10°C to 40°C (install in a well ventilated location)
Ambient operating humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2(No corrosive or flammable gases, no
contact with water, oils, or chemicals)
Exterior
External dimensions
480 W x 500 D x 150 H (excluding protrusions)
Configuration
Rack mount configuration
Weight
Approx. 23 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Connect to a three-phase 200 to 240 VAC (50 to 60 Hz) 5.0 kVA or higher power supply line and install a 40 A
breaker compliant with UL489/IEC60947-1 for the RF Generator.