Ulvac RFP-N - Page 24

RF POWER SUPPLY and MATCHINGBOX
2. Overview
16
Table 2-13 MBX-1330N specifications
Classification
Item
Specification value
MBX-1330N
Supply power
Rated input
voltage/current
24 VDC/3 A max (supplied from the RF generator)
RF input
Frequency
13.56 MHz ± 0.05%
Rated power
30 W or higher, 3000 W or less
Input impedance
50 Ω (when matching)
Input connector
HN-type receptacle
RF output
Permissible
output voltage
① 5000 Vpp
② 2500 Vdc
Permissible
output current
80 A or lower
(restricted by the permissible current of the variable capacitors)
RF output electrode
Copper plate: t3.0-40 (4-M4)
The area around the output electrode is not cooled.
If it reaches high temperatures, cool it to 120°C or lower.
Matching accuracy
Residual reflected
wave power
30 W or lower when matching or a value 0.3% or lower of input
traveling wave power, whichever is greater.
Variable capacitors
Variable capacitor
capacitance
TUNE: 1500 pF/MATCH: 500 pF
Coil
Adjustment method
Change inductance by changing the coil taps
Standard coil
4 taps
Cooling
Cooling method
Forced air cooling by fan/water cooling (2 l/min)
Connector: Rc3/8 (PT3/8) female
Water pressure:0.5MPa
See page 6 for water quality
Operating environment temperature
10°C to 40°C (install in a well ventilated location)
Operating environment humidity
15% to 85% RH (no condensation)
Operating environment
Avoid direct sunlight, heat, dust, and vibrations
Indoor use.
Overvoltage category II
Altitude 2000 m or lower
Pollution degree 2(No corrosive or flammable gases, no contact with
water, oils, or chemicals)
Exterior
External
dimensions
375W-250D-170H (excluding protrusions)
Weight
Approx. 10 kg
Compliant standard
EN_61010-1:2010/A1:2019
EN_55011:2016
EN_61000-6-2:2005
RoHS(EU Directive)
* Power derating is required for the rated power according to the matching point.
* See "Power derating" in this manual.