EasyManua.ls Logo

Ulvac RFP-N - Page 3

Default Icon
107 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
RF POWER SUPPLY and MATCHINGBOX
Introduction
ii
1. Safety precautions
1
Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair.
Accidents happen more easily by failing to comply with the safety precautions or neglecting to
anticipate danger. Accidents can be prevented before they happen by anticipating potentially
dangerous situations.
2
Accidents involving injuries are caused by erroneous operation or inadequate maintenance and
inspection work. Never try to operate the system before carefully reading and understanding the
content related to system operation, inspection, and maintenance.
3
Warnings and precautions about safety are listed in this manual and on the system's warning
labels. Ignoring these warnings and precautions may lead to injury or loss of life, so use caution.
4
Supervisors, operators, and maintenance personnel should read this manual before operating the
system or performing maintenance work. Only those who know how to handle the system and
have received training should perform the appropriate work on the system using the correct
techniques and tools.

Table of Contents

Related product manuals