RF POWER SUPPLY and MATCHINGBOX
26
Connect to the output connector on the side panel of the matching box using an RF
output coaxial cable. Use the following items.
・ HN output cable: RF393-HH
・ DIN output cable: RF393-DD
Use after attaching a connector on the load side as well. The following connector have
been checked and verified.
・ HN type: HN-R connector (Toko Denshi Co., Ltd.)
・ DIN type: J01121C0721 (Telegärtner Ltd.)
Attach the matching box in a stable location in which tension is not applied to the cable.
Furthermore, use a short cable. (Maximum of 1 m)
When RF is output by an HN connector, and there is a load error (no electrical
discharge or an electrode short), an automatic matching operation may cause the input
electric power to be consumed by the coaxial cable. In such a case, there is a risk of the
cable malfunctioning or generating heat, or the cable eroding. In the case of a load
error, please configure the limit for the variable condenser operation or install a
temperature interlock, such as by attaching a temperature sensor on the coaxial cable.
*Considerations during connector output
(1) Use a short cable. (maximum 1 m)
(2) When the load has shorted or opened, the cable may generate heat. Th
erefore, please install a temperature interlock for connector output.
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