Ulvac RFP-N - Page 36

RF POWER SUPPLY and MATCHINGBOX
3. Setup
28
Table 3-4 Details on the system wiring diagram codes
Wiring diagram code
Supported model
Remarks
RFS-****N
RFS-1305N
13.56 MHz/500 W RF Generator
RFS-1310N
13.56 MHz/1000 W RF Generator
RFS-1330N
13.56 MHz/3000 W RF Generator
RFS-1350N
13.56 MHz/5000 W RF Generator
AC**-N
AC01-N
Use for RFS-1305N/ RFS-1310N
AC05-N
Use for RFS-1330N/ RFS-1350N
RF**-N
RF01-N
Use for RFS-1305N/ RFS-1310N
RF03-N
Use for RFS-1330N
RF05-N
Use for RFS-1350N
Table 3-5 Cable list
Name
Model
Remarks
AC 200V INPUT
AC01-N
5 m/customer-side terminal is not prepared
15 AWG
AC 200V INPUT
AC05-N
5 m/customer-side terminal is not prepared
10 AWG
GND
Prepare this separately yourself.
Class D grounding (or Class A grounding)
RF cable
RF01-N
N-type plug
RF cable
RF03-N
HN-type plug
RF cable
RF05-N
DIN-type plug (7/16 DIN)
AMC cable
AMC-N
Communication cable
between the RF Generator and MBX
Panel cable
CONT-N
Required when using RFP-N
IF cable
Prepare this separately yourself.
External control connector
RS-232C cable
Prepare this separately yourself.
External communication connector
RS-232C_CROSS
* AC01-N is used with the RFS-1305N and RFS-1310N.
* AC05-N is used with the RFS-1330N and RFS-1350N.
* RF01-N is used with the RFS-1305N (MBX-1305N) and RFS-1310N (MBX-1310N).
* RF03-N is used with the RFS-1330N (MBX-1330N).
* RF05-N is used with the RFS-1350N (MBX-1350N).