Zeiss EVO - Page 157

ZEISS 9 Technical Data and Conformity | 9.3 Performance Data and Specifications | EVO 10
Parameter Description
Electron source Filament: W or LaB₆
Field of View § Maximum 6mm diameter
at the analytical working distance (AWD) of 8.5mm
§ Maximum20 mm diameter
at the longest working distance
X-ray analysis 8.5mm AWD and 35° take-off angle
Optibeam modes Resolution, Depth, Analysis, Field, Fisheye
Image framestore 32768×24576 pixel, signal acquisition by pixel, line and frame inte-
gration and averaging, including drift compensated frame averaging
(limitations may apply to averaging mode and maximum scan speed
for large images)
System control SmartSEM user interface operated by mouse and keyboard
Windows 10 multilingual operating system
Specimen Chamber
and Stage
Parameter Description
Specimen chamber
dimensions
§ 310mm inner diameter
§ 220mm height
Analytical working
distance
8.5mm
Specimen stage Type: 5-axes motorized Cartesian controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting: Drawer-type door
Movements:
§ X = 80mm
§ Y = 100mm
§ Z = 35mm
§ T = −10° to 90°
§ R = 360° continuous
INFO: The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Specimen height: max. 100mm (with the ZTR module removed)
Specimen diameter: max. 230mm
Specimen weight:
Standard stage
§ 0.5kg (full motion)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Large Z stage (optional)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 157