Zeiss EVO - Page 172

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10 Parts and Tools | 10.3 Tools and Accessories ZEISS

Required Parts/Tools Part Number

Toolbox including VP apertures and removal

tools

350600-0926-000

172 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006

Main Page

Table of Contents3
General Information6
Text Conventions and Link Types6
Explanation of Warning Messages and Additional Information7
Further Applicable Documents8
Contact8
Safety9
Intended Use9
General Safety Information10
Requirements for Operators10
Safe Operating Condition10
Prevention of Hazards11
Mechanical Hazards11
Electrical Hazards11
Hazards Generated by Materials and Substances12
Care and Maintenance12
Hazards Generated by Radiation13
Thermal Hazards13
Warning Labels and Lights13
Warning Labels14
Troubleshooting14
Safety Devices and Interlocks18
Protective Cover Panels18
Main Disconnect Device19
Circuit Breaker19
Locking Devices20
Product and Functional Description21
Vacuum System22
Variable Pressure Modes23
Electron Optical Column27
Optibeam Modes29
Detectors29
Principle of Signal Detection30
Detectors Overview32
SE Detector33
Chamber CCD Camera37
Specimen Stage38
Optional Components and Accessories39
Optional Detectors39
Dual Joystick47
Control Panel48
Decommissioning and Disposal48
Software Description50
Smartsem User Interface50
Graphical Control Elements51
User Access Levels and User Privileges52
Technical Data and Conformity52
Smartsem Program Suite53
Installation55
First Operating Steps56
Prerequisites for Commissioning and Operation56
Switching on the Microscope System56
Energizing the Microscope56
Starting the Microscope58
Starting the Software59
Calling up the Help59
Keyboard Shortcuts59
Acquiring an Image61
Preparing the Specimen Holder61
Loading the Specimen Chamber63
Locating the Specimen67
Switching on the Gun | Lab₆ Filament68
Switching on the EHT | Lab₆ Filament68
Choosing the Lab₆ Mode69
Setting up the Lab₆ Source70
Parts and Tools71
Switching on the Gun and EHT | Tungsten Filament72
Acquiring an Image73
Glossary73
Optimizing the Image76
Index76
Saving the Image79
Modifying Gun Parameters and Optibeam Mode79
Using the Automatic Gun Alignment Functions79
Using the Auto Aperture Alignment Function80
Setting the Probe Current81
Measuring the Probe Current81
Selecting the Optibeam Operation Mode81
Finding Appropriate Detector Settings82
Selecting a Detector82
Setting up the SE Detector83
Setting up the C2D Detector83
Setting up the C2DX Detector84
Setting up the BSD Detector85
Setting up the YAG BSD Detector87
Using the Variable Stage Bias88
Working with Specific Specimen Types91
Conductive Specimen91
Non-Conductive Specimen93
Hydrated Specimen97
Switching off the Microscope System108
Finishing the Work Session | Lab₆ Filament108
Finishing the Work Session | Tungsten Filament108
Closing the Smartsem User Interface109
Energizing the Microscope110
Performing an Emergency Shutdown111
Safety During Cleaning and Maintenance112
Maintenance Schedule112
Maintenance Work113
Change of Consumables and Chemicals113
Care and Cleaning Work113
Cleaning the Microscope113
Chamber115
Initializing the Stage115
Defining the Post Initialization Position of the Stage116
Changing the Joystick TV Angle116
Resetting the Touch Alarm117
Checking the Temperature117
Replacing the Chamber Door Seal117
Adjusting the Isolation Mounts119
Column120
Baking out the Gun Head120
Replacing Filaments121
Power Circuit147
Checking the Position of the Circuit Breakers147
Cleaning up the PC147
Decommissioning148
Transport and Storage149
Disposal151
Decontamination151
Layout and Connections152
System Layout153
Performance Data and Specifications | EVO 10153
Performance Data and Specifications | EVO 15159
Performance Data and Specifications | EVO 25164
Applicable Standards and Regulations169
Consumables171
Spare Parts171
Tools and Accessories171

Zeiss EVO - Page 172

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