2 Safety
6 User Guide
2.2 Conventions
Throughout this manual there are safety warnings. To classify the degree of danger in
each of these situations, this guide uses the conventions defined in ANSI Z535.6-2011:
Corrosive
material
hazard
Flammable
material
hazard
2.3 Laser Safety
The MLA150 employs two types of continuous wave lasers, one for position
measurement of the stage (interferometer laser), one for design exposure (exposure
laser). When the window is closed, all laser light is blocked or absorbed, and the system
is effectively of laser class 1.
When the window is opened for loading or unloading, the interferometer laser beam is
accessible. Under this condition, the system has the same laser class as the
interferometer laser in use, which is laser class 2.
The exposure laser beam is a powerful beam that is usually covered completely by
optics covers. Power and wavelength of the exposure laser depend on the specific
configuration, but the exposure laser beam is always dangerous for the eye, sometimes
also for the skin. Even reflected light may be dangerous.
If the optics covers are opened, the accessible energy is of the class 4 category
(DIN EN-60825-1).
Danger indicates a hazardous situation, which, if not avoided, will
result in death or serious injury.
Warning indicates a hazardous situation, which, if not avoided,
could result in death or serious injury.
Caution indicates a hazardous situation, which, if not avoided,
may result in minor or moderate injury.
Denotes warnings against possible misuse that can lead to
machine damage.
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