2 Safety
User Guide 9
2.5 Other Risks during Operation
Injuries by moving parts or heat!
If covers are removed, the operator may be exposed to
dangerous collisions with moving parts, or heated components.
Do not remove any covers that are fixed with screws
Heed the warnings if removing any other covers
Pinch risk by closing window!
Mild pinch injuries are possible if fingers are brought between
the upper window frame and the window while the window
closes. The loading window is driven pneumatically with low
pressure. It does not have enough force to injure a body or
limb, but skin may be pinched.
Don not close the window while resting a hand at the upper
frame or upper window edge.
Do not put a hand through the already closing window.
2.6 Interlock
To protect the operator from hazards by laser light or moving stage, interlock circuits
prevent stage movement and access to laser light as soon as the window opens. A
safety switch stops the stage, holding it in position, and closes the laser shutter. If an
exposure has been running at that moment, the result is irreversibly lost.
The stage interlock can be overridden by service engineers by a key switch for
servicing, together with a confirmation from the menu. While this service mode is
activated, the main bar and background of the Exposure Wizard turns red.
Injuries by moving parts or laser light!
While the system is in service mode, dangerous levels of laser
light are accessible, and the stage can move with window open.
Only HIMT service engineers are allowed to put the machine into
service mode.
During servicing or maintenance by service engineers, heed
the warnings given in the Safety Guide.
If service mode was left active accidentally, switch back to safe
mode and remove the key. Return it to the service local office.
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