6 Job Setup
User Guide 55
The machine is exposing the design. If Auto-Unload is
not activated, then after completion of the exposure a
dialog window pops up asking if the substrate should be
unloaded. Click Yes, if you want the system to unload
the substrate or No if the substrate should stay loaded
on the chuck e. g., to expose the next layer.
It is also possible to click No and unload the substrate by clicking Unload in the
panel (see 6.9 Substrate Unloading).
6.8.2 OVERLAY EXPOSURE PROCEDURE
After having loaded the design and the substrate and having prepared the alignment
crosses, the substrate is ready to be exposed.
In the Alignment: Exposure panel
Double-check the design name and the wavelength.
If no default value is given, set the Dose value by entering it into the text field.
Set the Defoc by selecting a value with the spin buttons (range -10 to 10). The
defoc allows fine tuning of the exposure focus.
Double-check the Alignment Cross Positions.
Optional: It is possible to load a template for alignment crosses which are
exposed on the layer. To load this template, double-click into the value field titled
Expose Crosses and select a bitmap template file from the list
Chose from the Alignment Options section:
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