8 Operator Maintenance and Troubleshooting
User Guide 71
This chapter contains some notes on daily maintenance by the operator as well as
some troubleshooting for the most common problems. For more in-depth maintenance
and troubleshooting information, refer to the related document Maintenance Guide.
8.1 Operator Maintenance
MLA systems require some minimal operator maintenance that does not involve
opening any covers or protective panels and can be done by any trained operator.
These tasks are described below.
SYSTEM CHECKS
Before operation the following routine maintenance should be performed:
Clean the chuck surface with a dry clean wipe. Never use Acetone! If more
thorough cleaning is required, use industry-grade ethanol or isopropanol.
Verify that the clean room conditions are within the limits given in the Technical
Data section.
Make sure nothing is placed inside the system that obstructs stage movement
ENVIRONMENTAL ADJUSTMENT
Allow room humidity to come within the specified range before using the MLA150.
If temperature is out of range, determine how long this condition has prevailed.
Adjust room temperature to within the specified temperature range and allow the
MLA150 to stabilize.
For stabilization of the system, allow an amount of time at least equal to the time
the temperature was out of range.
During exposure, the most accurate results are obtained
when the environment remains at a constant temperature
and humidity.
To achieve the optimum accuracy, the substrate requires
thermal stabilization before exposure. This might take some
time depending on the material, thickness and actual
temperature.
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