HEIDELBERG MLA150 User Manual

MLA150
3 System Description
User Guide 13
This chapter gives a short description of the MLA150 lithography system. The MLA150
system consists of the following individual components:
 Lithography Unit
 Electronics Rack
 Cooling water supply (not explicitly described in this document)
 Operator workstation
The main principle of the functional interaction between the system components is as
follows:
A workstation comprising two computer monitors, a keyboard, a mouse and the User
PC, that is located inside the electronics rack, represents the interface between user
and system. The user controls the system via our graphical user interface on the User
PC. This data is processed by the components located inside the electronics rack such
as the stage controller which communicates with the stage and controls its movement
based on the feedback given by interferometers that are placed in the main unit.
The system has two cooling water supply units, called chillers. One of them makes sure
that the system runs in a stable environment in terms of temperature. The other one
serves as cooling unit for the laser and the motors.
USER PC
design positioning
alignment sequences
system parameters
conversion: CAD design
conversion
exposure data
MLA
Main Unit
Flow Box
sensors
control
cooling water supply
for Flow Box
cooling water supply
for Main Unit
ELECTRONICS RACK
data
Figure 1: System components

HEIDELBERG MLA150 Specifications

General

Brand	HEIDELBERG
Model	MLA150
Category	Mask Aligners
Language	English