HEIDELBERG MLA150 User Manual

MLA150
4 Wizard Description
28 User Guide
4.2.3 INFO SECTION
The Info Section consists of four subsections:
 Exposure Info
 Alignment Info
 Progress Info
 Hardware Info
Exposure Info
 Job Name is a combination of the word job and the job number. It is editable in the
Job frame by double-clicking into the Job Name value field.
 No. shows the auto-incrementing number of the job, it is not editable.
 Substrate Size[mm] shows the size of the substrate that is currently loaded.
 Design Name shows the name of the design that is currently loaded.
 Design Size [mm] shows the size of the design.
 Dose [mJ/cm²] shows the exposure energy for the current job.
 Height shows the height of the substrate on the cuck.
 Layer shows the layer that is currently being prepared for exposure.
 Mode shows the exposure quality level chosen at conversion. Quality means high
level, Fast means lower quality level but faster completion.
 Defoc shows the defocus value selected for the current exposure. The defoc with a
range between -10 to 10 allows fine tuning of the exposure focus (for more
information see 3.1.3 Optics System: Pneumatic Autofocus). This value can be
adjusted before starting the design exposure (6.8 Expose Design)

HEIDELBERG MLA150 Specifications

General

Brand	HEIDELBERG
Model	MLA150
Category	Mask Aligners
Language	English