HEIDELBERG MLA150 User Manual

MLA150
3 System Description
User Guide 21
defocusing range [-10 to 10]. This range is necessary to adapt the focus distance to
an appropriate value which mainly depends on resist thickness and thus varies.
INTERFEROMETER
The laser interferometer is an optical device for measuring the stage position. The
machine achieves its required positioning precision with this important element.
WRITE HEAD
The write head is mounted to the optics plane. The focal length of the write lens
determines the resolution of the system.
Interferometer
Laser Unit
(HeNe)
X Mirror
X interferometer unit
Y interferometer unit
Stage
Y Mirror
Figure 7: Interferometer function

HEIDELBERG MLA150 Specifications

General

Brand	HEIDELBERG
Model	MLA150
Category	Mask Aligners
Language	English