2 Safety
User Guide 5
The MLA150 protects operators from exposure to laser radiation, dangerous voltages or
moving parts while operating the equipment. All moving parts, lasers and their
associated optics are enclosed within a flow box. During operation, opening the flow box
window will immediately stop any exposure or measurement process.
Still, it is vital that the operators and all other persons who are allowed access to the
system have been informed about any remaining risks.
2.1 Intended Use and Limitations
The intended use of the MLA150 lithography system is to expose structures on
photosensitive, non-flammable layers which are located on non-flammable substrates.
These substrates must not exceed the specified maximum dimensions and must be free
of damage such as scratches or cracks.
The MLA150 is intended only for professional use. The related user documentation is
part of the product, and the user is under the obligation to read the documentation
before using the product.
Every other purpose of use than that stated in this section is prohibited. In case of
damage by using the product outside this stated purpose, no liability is assumed by the
Heidelberg Instruments Mikrotechnik GmbH.
In addition to the intended use stated above, the following purposes of use are
prohibited and defined as misuse:
Operation outside the operating data stated in the data sheet or in the sales
confirmation.
Operation with materials other than the approved materials.
Change of the factory settings by unauthorized persons.
Use of attachment parts other than Heidelberg Instruments components.
Operation of the system in a potentially explosive environment or aggressive
atmosphere.
No untrained person, or person not familiar with the contents of the following sections
is allowed to operate the system or work in its close environment. If instructions are not
followed carefully, danger to personal health and damage to the equipment is at risk.
At all times, follow all warnings and instructions given in this manual, the system
software, safety labels on the system, or by our engineers.
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