Table of Contents
User Guide i
Table of Contents
Table of Contents ........................................................................................................... i
List of Figures ............................................................................................................... iv
List of Tables ................................................................................................................ iv
1 Introduction ........................................................................................................... 1
1.1 About this User Guide ............................................................................................. 1
1.2 Contact .................................................................................................................... 2
1.3 Related Documentation ........................................................................................... 3
2 Safety ..................................................................................................................... 5
2.1 Intended Use and Limitations .................................................................................. 5
2.2 Conventions ............................................................................................................ 6
2.3 Laser Safety ............................................................................................................ 6
2.4 Electrical Safety ...................................................................................................... 8
2.5 Other Risks during Operation .................................................................................. 9
2.6 Interlock .................................................................................................................. 9
2.7 Labels ................................................................................................................... 10
3 System Description ............................................................................................. 13
3.1 Lithography Main Unit ........................................................................................... 14
3.1.1 Flowbox ................................................................................................... 14
3.1.2 System Components ............................................................................... 17
3.1.3 Optics System ......................................................................................... 20
3.2 Electronics Rack ................................................................................................... 22
3.3 Orientation of Stage and Design ........................................................................... 23
4 Wizard Description .............................................................................................. 25
4.1 Overview: Exposure Wizard .................................................................................. 25
4.2 Static Wizard Elements ......................................................................................... 27
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