Table of Contents
ii User Guide
4.2.1 Menu Bar ................................................................................................. 27
4.2.2 Tab Section .............................................................................................. 27
4.2.3 Info Section .............................................................................................. 28
4.3 Substrate Representation ...................................................................................... 31
5 System Startup .................................................................................................... 33
5.1 Powering Up .......................................................................................................... 33
5.2 Powering Down ..................................................................................................... 34
6 Job Setup ............................................................................................................. 35
6.1 Select Job .............................................................................................................. 36
6.2 Select Substrate Template .................................................................................... 37
6.3 Load Design .......................................................................................................... 38
6.3.1 Standard: First Exposure ......................................................................... 38
6.3.2 Standard: Alignment ................................................................................ 39
6.3.3 Series ....................................................................................................... 40
6.4 Convert Design ...................................................................................................... 41
6.5 Load Substrate ...................................................................................................... 43
6.6 Draw Structures ..................................................................................................... 46
6.6.1 Draw Image ............................................................................................. 47
6.6.2 Draw Line or Polygon ............................................................................... 48
6.6.3 Expose Crosses in Draw Mode ................................................................ 49
6.7 Setup Overlay Alignment ....................................................................................... 50
6.8 Expose Design ...................................................................................................... 54
6.8.1 First Exposure Procedure ........................................................................ 54
6.8.2 Overlay Exposure Procedure ................................................................... 55
6.8.3 Series Exposure Procedure ..................................................................... 57
6.8.4 Draw Mode Exposure Procedure ............................................................. 59
6.9 Unload Substrate ................................................................................................... 60
7 System Utilities and Tools .................................................................................. 63
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