6 Job Setup
User Guide 59
The machine is exposing the design. If Auto-Unload
is not activated, then after completion of the
exposure a dialog window pops up asking if the
substrate should be unloaded. Click Yes, if you want
the system to unload the substrate or No if the
substrate should stay loaded on the chuck e. g., to
expose the next layer.
6.8.4 DRAW MODE EXPOSURE PROCEDURE
After creation and submission of the image, you are still in the Draw Mode panel to start
the exposure.
In the Draw Mode panel
Set the Dose value by entering the value into the text field.
Set the Defoc by selecting the value with the spin buttons (range -10 to 10). The
defoc allows fine tuning of the exposure focus.
Optional: Activate Auto-Unload. The system executes the unloading procedure
automatically (see 6.9 Unload Substrate).
Click Start Exposure.
In the Progress Info section the table changes to a list displaying the Draw Mode
procedures that are already executed. The most recent one is listed at the top of
the list. You also find the information about the type of draw mode image and the
coordinates of the center of the image.
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