3 System Description
User Guide 17
3.1.2 SYSTEM COMPONENTS
SYSTEM SUPPORT
A heavy-duty aluminum construction and four buffers that are filled with air to ensure
vibration isolation support the granite base plate. To avoid any unnecessary bending
forces in the base plate, these buffers are arranged in a triangular geometry (the two
buffers at the front side are close together and act as one point).
HEIGHT-ADJUSTABLE FEET
The granite construction stands on four height-adjustable feet. By varying the height
of the feet the system is leveled in correspondence with the ground condition in the
location the system is installed. The castor wheels of the flow box are not height-
adjustable.
BASE PLATE (MAIN BLOCK)
The main unit has a granite base that gives stability to the system. It has been
selected for its low thermal expansion coefficient. The granite base plate is
supported by air buffers that ensure effective vibration isolation and has threaded
holes to accept other system components. Medium and high-power lasers are
mounted at the bottom of the base plate to minimize heat generation in the areas
that are sensitive to heat.
OPERATOR PANEL
The operator panel has a push button (1) that opens
the vacuum inlet to fix the substrate on the chuck. For
observing the vacuum status, a display (2) shows the
current vacuum status. However, it is not necessary to
observe the status because the wizard informs about
vacuum supply problems. The panel also contains two
LED lights (3) indicating the status of the laser. The
lights are on throughout the whole exposure
procedure. When the window is open, the lights are
off indicating that the laser(s) is (are) off (see 4.2.3
Info Section).
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