3 System Description
18 User Guide
STAGE SYSTEM
The stage is equipped with linear motors in both axes. They provide smooth and
constant movement with low positioning errors. One air bearing and one roller
bearing support the movement in y-direction whereas the x-axis is equipped with two
roller bearings.
The stage carries the frame in which the chuck is located. There is one chuck for all
substrate sizes. The substrate is hold down and kept it in place by vacuum suction.
The chuck features a vacuum suction hole in the center and four small vacuum slits
through which the vacuum reaches the substrate. Due to the viewing slots, backside
alignment is possible without installing a different chuck. One of the slots is
surrounded by a recess in which the adjustment aid is inserted to provide proper
substrate placing on the chuck. Another one is also surrounded by a recess giving
space for a tweezer to facilitate substrate loading.
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