HEIDELBERG MLA150 - Figure 6: Stage System with Optics Plane

MLA150
3 System Description
User Guide 19
OPTICS PLANE
The optics system is located on a smaller granite top plate supported by the base
plate and its granite side elements. The optics plane contains the optical elements
and all camera components. The write head stands at the end of the optical path
and is mounted to this plate with downward beam direction facing the substrate.
1
INTERFEROMETER HEAD
2
OPERATOR PANEL
3
STAGE
4
CHUCK
5
WRITE HEAD
6
OPTICS PLANE
Figure 6: Stage system with optics plane
1
4
6
5
2
3