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MLA150
HEIDELBERG MLA150 User Manual
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MLA150
3 System Description
User Guide
19
OPTICS PLANE
The optics system is located on a smaller granite top plate supported by the base
plate and its granite side elements. The optics plane contains the optical
elements
and all camera components. The write
head
stands at the end of the optical path
and
is mounted to this
plate with downward beam direction
facing the substrate.
1
INTERFEROMET
ER HEAD
2
OPERATOR PAN
EL
3
STAGE
4
CHUCK
5
W
RITE HEAD
6
OPTICS PLANE
Figure 6: Stage sys
tem with optics plane
1
4
6
5
2
3
24
26
Table of Contents
Default Chapter
3
Table of Contents
3
1 Introduction
7
About this User Guide
7
Contact
8
Related Documentation
9
2 Safety
11
Intended Use and Limitations
11
Conventions
12
Laser Safety
12
Electrical Safety
14
Other Risks During Operation
15
Interlock
15
Labels
16
3 System Description
19
Figure 1: System Components
19
Lithography Main Unit
20
Flowbox
20
Figure 2: Elements of the Laminar Flow Box
21
Figure 3: Temperature Control Readout
21
System Components
23
Figure 4: System Support
23
Figure 5: Operator Panel
23
Figure 6: Stage System with Optics Plane
25
Optics System
26
Figure 7: Interferometer Function
27
Electronics Rack
28
Figure 8: E-Rack Components
28
Orientation of Stage and Design
29
Figure 9: Orientation of Stage and Design
29
Figure 10: Machine-Related Design Rotation
29
Figure 11: Rotation of Coordinate System on Chuck
30
Figure 12: Location of Coordinate Pairs
30
4 Wizard Description
31
Overview: Exposure Wizard
31
Figure 13: Wizard Window Overview
31
Static Wizard Elements
33
Menu Bar
33
Tab Section
33
Info Section
34
Substrate Representation
37
5 System Startup
39
Powering up
39
Powering down
40
6 Job Setup
41
Select Job
42
Select Substrate Template
43
Load Design
44
Standard: First Exposure
44
Standard: Alignment
45
Series
46
Convert Design
47
Load Substrate
49
Draw Structures
52
Draw Image
53
Draw Line or Polygon
54
Expose Crosses in Draw Mode
55
Setup Overlay Alignment
56
Expose Design
60
First Exposure Procedure
60
Overlay Exposure Procedure
61
Series Exposure Procedure
63
Draw Mode Exposure Procedure
65
Unload Substrate
66
Figure 14: Unloading Options in Standard Mode and Series Mode
66
7 System Utilities and Tools
69
Control Panel
69
Camera Window
71
Figure 15: Camera Window
71
Optimizing Alignment and Exposure Results
72
Unsatisfying Alignment Measurements
72
Unsatisfying Exposure Results
73
Back Side Alignment
74
Overview of BSA Marker Zones
74
Figure 16: BSA Marker Zones Overview
75
BSA Exposure Preparation
76
Figure 17: Orientation on Wafer for BSA
76
8 Operator Maintenance and Troubleshooting
77
Operator Maintenance
77
Troubleshooting
78
Teamviewer Software
79
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HEIDELBERG MLA150 Specifications
General
Brand
HEIDELBERG
Model
MLA150
Category
Mask Aligners
Language
English
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