HEIDELBERG MLA150 - 3.1 Lithography Main Unit; 3.1.1 Flowbox

MLA150
3 System Description
14 User Guide
3.1 Lithography Main Unit
The Main Unit comprises the following elements:
 Flow box
 Granite Construction
 Optics System
3.1.1 FLOWBOX
The flow box is the housing of the lithography system and protects the MLA150 from
damage. It also provides a stable environment in terms of temperature, laminar flow and
clean air. This is of importance because only such a stable environment guarantees
constant exposure conditions which guarantees the smallest possible variation of
exposure parameters. The covers of the flow box are removable, but only for service
purposes.
Injuries by moving parts or laser light!
Severe damage to the eye and possibly to the skin can be
caused by laser radiation of class 3B or 4
 Do not open the covers of the flow box.
 Flow box covers may be opened only by, or under direct
instruction from, experienced service personnel!