2.3 How to Install
2-19
2. Installation
About Suction of the Cleanroom Type
● Cleanroom type actuators are able to exert performance corresponding to cleanroom class
10 (0.1μm, Fed.Std.209D) and class 2.5 equivalent (ISO 14644-1) by aspirating air from
the vacuum joint.
The guidelines of the suction amounts for the rated speeds of each model are shown in the
following table.
[Suction amount guideline]
Single slider specification
Model Number Lead [mm]
Suction Amount
Nl/min (L/min)
SA4C
16 60(65)
10 40(43)
5 20(22)
2.5 10(11)
SA6C
20 100(108)
12 70(76)
6 30(32)
３ 15(16)
SA7C
24 90(97)
16 70(76)
8 40(43)
4 30(32)
SA8C
20 160(173)
10 80(86)
5 40(43)
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