Inficon Transpector MPH - Page 132

7 - 2
Transpector MPH Operating Manual
EMISSION error (Cold
Start, Warm Start)
Defective sensor filament
open, shorted
Check sensor with OHM
meter.
Replace sensor or filament.
Electronics failure Return to INFICON for repair.
Insufficient vacuum Verify pressure is less than
5E-4 Torr.
Sensor operating voltages
incorrect
Verify correct settings
Contact INFICON for
assistance.
Transpector MPH electronics
box not fully engaged on
sensor
Make sure that the
Transpector MPH electronics
module is pushed all the way
on sensor.
ANODE error Defective sensor, anode
shorted
Check sensor with OHM
meter for shorts. See sensor
pin-out diagram.
Fix or replace sensor.
Electronics failure Return to INFICON for repair.
RF error Defective sensor, RF leads
open RF/DC card fault
Fix or replace sensor.
Electronics failure Return to INFICON for repair.
Electron Multiplier
error
Defective sensor, EM shorted Check sensor with Ohm
meter. See sensor pin-out
diagram.
Fix or replace sensor.
EM just replaced Verify that EM is plugged into
the HV pin properly.
Electronics failure Return to INFICON for repair.
Table 7-1 Symptom—Cause—Remedy chart (continued)
SYMPTOM CAUSE REMEDY