Inficon Transpector MPH

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Transpector MPH Operating Manual

Figure 3-2 Sensor’s ion source

Electron Repeller

Filament (Cathode)

Anode (with Cage)

Focus Lens

Source Exit Lens

Main Page

Table of Contents5
Getting Started12
Introduction12
Using this Manual13
Note and Hint Paragraphs13
Warning and Caution Paragraphs13
How to Contact Customer Support14
Returning Your Transpector MPH to INFICON14
Quick Start15
Purpose of the Transpector MPH Gas Analysis System15
General Description of the Transpector MPH16
Gas Analysis System16
Specifications for the Transpector MPH Gas Analysis System16
Supplied Items16
Physical Requirements17
Physical Dimensions17
Weight17
Mounting Requirements18
Ventilation Requirements18
Maintenance Access18
Electrical Power Requirements18
Required Supply Voltage18
Current Rating18
Electrical Connection18
Overvoltage Category19
Required Vacuum19
Environmental Requirements19
Use19
Altitude Range19
Pollution Degree19
Operating Temperature19
Humidity19
Computer System Requirements19
Software Installation19
Hardware Installation20
Sensor Installation20
Conflat Flanges21
Assembling Conflat Flanges21
Attaching the Sensor to the Vacuum Chamber21
Electronics Module Installation25
Installing Ethernet Communications26
Connecting the 24 V(DC) Power Supply26
Installing the Pirani Interlock (Optional)27
Installing the Pirani Gauge on to the Extension Flange28
Installing the Extension Flange and Sensor Onto the Vacuum System28
Connecting the Pirani Interlock Cable29
Installing the HPR Calibration Reference (Optional)30
Installing the Calibration Reference on to the Extension Flange31
Installing the Extension Flange, Sensor, and Electronics Module33
Connecting the HPR Valve Control Cable33
Input/Output (I/O)34
Two Digital Inputs34
One Status Relay Output34
One Analog Input36
Installing the Heater Jacket Mount Kit (Optional)36
Introduction38
General Networking Information38
IP Addresses38
IP Address38
Connecting Transpector MPH38
Connecting a Single Transpector MPH51
Single Transpector MPH Direct Connection Installation51
Installing a Single Transpector MPH on an Existing Local Network51
Installing Multiple Transpector MPH Sensors52
Installing Multiple Transpector MPH Directly to a Host Computer52
Installing Multiple Transpector MPH on an Existing Local Network52
How the Instrument Works53
Introduction53
Overview53
The Ion Source54
Choosing the Proper Filament57
Yttria-Coated Iridium Filaments57
Tungsten Filaments57
The Quadrupole Mass Filter58
Scanning Characteristics60
The Zero Blast61
The Ion Detector62
The Faraday Cup Detector62
The Electron Multiplier (EM) Detector63
The Continuous Dynode Electron Multiplier/Faraday Cup Detector64
Applications Guide66
How to Interpret the Result66
Qualitative Interpretation of Mass Spectra66
Ionization Process67
Isotope Ratios68
Electron Energy Effects70
A Qualitative Interpretation Guide71
Quantitative Interpretation of Mass Spectra73
(Calculating Partial Pressures)73
Additional Information for Interpreting Mass Spectra79
Ion Source Characteristics79
Scanning Characteristics80
Fragmentation Factors81
Using Transpector Web UI82
Introduction82
What Is Transpector Web UI82
System Requirements83
Using Transpector Web UI on Computers83
Using Transpector Web UI on Mobile Devices83
Connecting to Transpector Web UI84
Connecting to Transpector Web UI with Default Factory IP Address84
Connecting to Transpector Web UI with a User-Defined IP Address86
Navigating Transpector Web UI86
Status86
Monitor88
Leakcheck88
Diagnostics89
Tune90
Help90
Print90
Using Transpector Web UI91
Transpector Web UI and Fabguard91
Standalone Transpector Web UI Operation92
Data Acquisition92
Editable Parameters92
How to Change Scan Parameters93
Leak Checking95
Leak Check Components96
Using the Leak Check Mode98
Tune Mode98
Tune Mode Components99
Default Tune Mode Parameters102
Tuning Transpector MPH103
Changing the Transpector MPH IP Address and Port Number104
Manually Changing the IP Address105
Using DHCP to Allow the Network to Assign an IP Address106
Changing the Port Number of Transpector MPH106
Changing the Subnet Mask of Transpector MPH107
Changing the Gateway of Transpector MPH107
Changing the Sensor ID and Description107
Transpector Web UI Best Known Methods108
When to Use Transpector Web UI108
Vacuum Diagnostics108
Leak Checking108
Remote Monitoring108
Generating Shortcuts for Quick Access109
Creating Bookmarks111
Using Wi-Fi112
Why Use Wi-Fi112
Troubleshooting112
Maintenance113
Introduction113
Safety Considerations113
Toxic Material113
Radiation113
Electrical Voltages114
General Instructions for All Repair Procedures114
Maintenance Procedures115
Bakeout of Quadrupole115
Spare Heating Jacket Part Numbers115
Repair Procedures116
Tools Required116
Tools for Replacing the Filament Kit116
Tools for Replacing the Ion Source116
Tools for Replacing the Electron Multiplier116
How to Determine if a Filament Kit Replacement Is Required117
Filament Kit Replacement118
Ion Source Removal121
Electron Multiplier Replacement123
Calibration127
Mass Alignment127
Factory Tuning127
Selecting Tune Masses128
Selecting Masses for Tuning with a CPM Test Mixture Calibration Reference128
Selecting Masses for Tuning with an Argon Standard Calibration Reference129
Selecting Masses for Tuning with a User-Supplied Test MIX129
Selecting Masses for Tuning with Process Gases129
Tuning with Background Gases130
Diagnosing Problems131
Introduction131
Symptom-Cause-Remedy Chart131
Communication Problems136
Glossary138
Transpector MPH Accessories and Spare Parts145
Introduction145
MPH Accessories145
Transpector MPH Spare Parts146
Preventative Maintenance Parts146
Replacement Spare Parts146
Spare Transpector MPH Electronics Boxes147
Spare Transpector MPH Sensors147
Specifications148
Introduction148
Sensor Length (Vacuum Side)148
Mass Range148
Detector Type148
Resolution149
Temperature Coefficient149
Sensitivity149
Minimum Detectable Partial Pressure149
Maximum Operating Pressure150
Maximum Sensor Operating Temperature150
Maximum Bakeout Temperature150
Operating Temperature150
Power Input150
Ethernet Communication Interface151
Relay Outputs151
Inputs151
Indicators (Green)151
Introduction152
Ship Kit152
Electronics Module153
Power Supply153
Sensor153
Extension Kit154
Software155
Heating Jacket System (Optional)155
Calibration Reference (Optional)155
Interlock Kit (Optional)155
Angle Valve (Optional)156

Inficon Transpector MPH - Page 55

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