Inficon UL3000 Fab ULTRA - Page 35

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UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109) 35 / 152
Digital input pin 10 (IO1000) No function
Machine factor vacuum mass 2 1
Machine factor vacuum mass 3 1
Machine factor vacuum mass 4 1
Leak rate filter I•CAL
Cathode Cathode 1 auto (can only be changed
by service)
Lower pressure limit SL200 capillary
clogged
0.1 mbar
Upper pressure limit SL200 capillary broken 1 mbar
Audio alarm TRIGGER
Audio alarm delay 60s
Notification beep On
Inlet area offset mass 2 1.3 × 10
-10
A
Inlet area offset mass 3 6.7 × 10
-14
A
Inlet area offset mass 4 3.3 × 10
-15
A
Analog output IO1000 upper exponent -5
Pressure unit (display) mbar
Leak rate unit vacuum operation (display) mbar l/s
Leak rate unit sniffer operation (display) mbar l/s
Sniffer line light alarm configuration (SL3000
only)
Flashing
Sniffer line light brightness (SL3000 only) 5
Sniffer line beep (SL3000 only) Beep when setpoint 1
Operation mode Vacuum
Amplifier test during calibration On (can only be changed by service)
Alternating preamplifier ranges monitoring On (can only be changed by service)
Lower pressure limit SL3000 capillary
clogged
80 mbar
Upper pressure limit SL3000 capillary
broken
200 mbar
Pressure limit MASSIVE -> GROSS 15.0 mbar
Pressure limit GROSS -> FINE 2.0 mbar
Pressure limit FINE -> ULTRA 0.3 mbar
Max. evacuation time gross leak 600s
Max. evacuation time measurement 1800s
Gross leak protection leak rate limit 1 x10
-3
mbar l/s
Gross leak protection Off