Inficon UL3000 Fab ULTRA - Page 36

4 | Description INFICON
36 / 152 UL3000-Fab-ULTRA-Operating-instructions-iinb73en1-09-(2109)
Particle protection Off
Background suppression internal only
Ventilation delay manually
Device at the LD connection I/O module
Maintenance messages all activated
Vacuum ranges MASSIVE, GROSS, FINE and ULTRA
(all ON)
Bus module address 126
Calibration leak external vacuum Hydrogen 1 x10
-7
mbar l/s
Calibration leak external vacuum mass 3 1 x10
-7
mbar l/s
Calibration leak external vacuum Helium 1 x10
-7
mbar l/s
Calibration leak external sniffer Hydrogen 1 x10
-5
mbar l/s
Calibration leak external sniffer mass 3 1 x10
-5
mbar l/s
Calibration leak external sniffer Helium 1 x10
-5
mbar l/s
Local control Released
Clock style Analog
Display background at standby Off
Raise lower leak rate limit 0
Minimum volume 0
HYDRO•S Deactivated
Note on the exhaust hose connection Activated
Set maintenance interval
Sniffer tip filter 1000h
Air filter 2500h
Set user
Name Supervisor
PIN 1111
Language English
Auto Leak Test
Min. test time 5s
Max. test time 10s
Part numbering ON
Part number 1
Warning limit for consecutive failed tests 5
Diagram type Line chart
Line chart
Scaling Logarithmic