MKS 651C - Page 151

Appendix F: Command and Request Reference Re
q
uest and Res
p
onse Reference
137
RS-232 Request and Response Summary
(Continued)
Request Message Information Requested Response Message
R29
Set point D type (either
pressure or position)
T4
type
, where
type
equals:
0 = position
1 = pressure
R30
Set point E type (either
pressure or position)
T5
type
, where
type
equals:
0 = position
1 = pressure
R31
Position indicator range
output
B
value
, where
value
equals:
0 = 5 Volts
1 = 10 Volts
R32
Direct/reverse control
N
value
, where
value
equals:
0 = direct
1 = reverse
R33
Sensor range
E
value
, where
value
equals:
00 = 0.1 10 = 1000
01 = 0.2 11 = 5000
02 = 0.5 12 = 10000
03 = 1 13 = 1.33
04 = 2 14 = 2.66
05 = 5 15 = 13.33
06 = 10 16 = 133.3
07 = 50 17 = 1333
08 = 100 18 = 6666
09 = 500 19 = 13332
R34
Pressure units
F
value
, where
value
equals:
00 = Torr
01 = mTorr
02 = mbar
03 = µbar
04 = kPa
05 = Pa
06 = cmH
2
O
07 = inH
2
O
Table 27: RS-232 Request and Response Summary
(Continued on next page)