Ulvac RFP-N - Page 49

RF POWER SUPPLY and MATCHINGBOX
4. Functions
41
100msec～1sec
100msec～1sec
RF-ON/OFF
EXT.CONT(1-2)
Power Setting
EXT.CONT(12-9)
Pf Monitor
EXT.CONT(10-9)
Motor Strobe
EXT.CONT(32-31)
TUNE/MATCH
Analog Preset
EXT.CONT(18/19-13)
TUNE/MATCH
Position Monitor
EXT.CONT(44-45/46-47)
ON
OFF
0V
0V
OPEN
CLOSE
10V
10V
0V
10V
0V
10V
Figure 4-9 Timing chart during external control