Ulvac RFP-N - Page 50

RF POWER SUPPLY and MATCHINGBOX
4. Functions
42
RF-ON/OFF
EXT.CONT(1-2)
PRG STROBE
EXT.CONT(33-31)
ACK
EXT.CONT(42-43)
PRG SELECT
EXT.CONT
(27/28/29/30-31)
MOTO STROBE
EXT.CONT(32-31)
TUNE/MATCH
Position Monitor
EXT.CONT(44-45/46-47)
ON
OFF
CLOSE
OPEN
0V
10V
0V
10V
100msec～1sec 100msec～1sec
CLOSE
OPEN
500msec 500msec
100msec～1sec 100msec～1sec
Table 4-4 Program No. selection
SELECT NO
0
1
2
3
PROGRAM NO
0
○OPEN
○OPEN
○OPEN
○OPEN
1
●CLOSE
○OPEN
○OPEN
○OPEN
2
○OPEN
●CLOSE
○OPEN
○OPEN
3
●CLOSE
●CLOSE
○OPEN
○OPEN
4
○OPEN
○OPEN
●CLOSE
○OPEN
5
●CLOSE
○OPEN
●CLOSE
○OPEN
6
○OPEN
●CLOSE
●CLOSE
○OPEN
7
●CLOSE
●CLOSE
●CLOSE
○OPEN
8
○OPEN
○OPEN
○OPEN
●CLOSE
9
●CLOSE
○OPEN
○OPEN
●CLOSE
A
○OPEN
●CLOSE
○OPEN
●CLOSE
B
●CLOSE
●CLOSE
○OPEN
●CLOSE
C
○OPEN
○OPEN
●CLOSE
●CLOSE
D
●CLOSE
○OPEN
●CLOSE
●CLOSE
E
○OPEN
●CLOSE
●CLOSE
●CLOSE
F
●CLOSE
●CLOSE
●CLOSE
●CLOSE
*The program cannot be changed during RF-ON or motor operation.
Figure 4-10 Program number modification timing chart