Ulvac RFP-N - Page 63

RF POWER SUPPLY and MATCHINGBOX
4. Functions
55
T
I
M
E
2
0
1
2
N
O
V
1
9
0
0
:
0
0
R
F
S
-
1
3
1
0
N
V
e
r
.
1
.
1
3
.
0
2
F
B
U
S
:
0
0
0
.
0
0
0
Figure 4-31 Current time configuration screen (P17)
Item
Parameter details
TIME
Displays and configures the current time.
Model
Displays the RF generator model.
Soft.Ver
Displays the software version.
FBUS
Displays the FBUS software version
* When the breaker is turned on, the above current time configuration screen may be displayed.
It is displayed if the system is not powered for two weeks or longer after the breaker is turned
off
L
O
G
0
‘
1
0
D
E
C
0
2
1
4
:
1
2
O
V
E
R
H
E
A
T
f
5
5
0
W
T
5
0
V
p
2
0
0
V
r
2
0
W
M
6
0
V
d
-
2
0
V
Figure 4-32 ALARM log screen (P18)
Item
Parameter details
LOG
Displays the time and alarm name when an alarm occurs.
* Stores up to the past 16 occurrences.
f
Pf detection value when the alarm occurred
r
Pr detection value when the alarm occurred
T
TUNE position value when the alarm occurred
M
MATCH position value when the alarm occurred
Vp
VPP voltage detection value when the alarm occurred
Vd
VDC voltage detection value when the alarm occurred