Ulvac RFP-N - Page 64

RF POWER SUPPLY and MATCHINGBOX
4. Functions
56
M
=
2
0
0
0
/
3
0
0
0
G
1
0
Z
=
2
0
0
0
/
1
4
7
5
G
1
0
T
=
5
0
O
=
2
0
0
0
/
1
4
7
5
G
1
0
M
=
6
0
r
=
0
W
A
U
T
O
P
R
G
=
0
Figure 4-33 Impedance sensor screen (P19)
Item
Parameter details
M
Impedance sensor value M: motor value/threshold/gain
Z
Impedance sensor value Z: motor value/threshold/gain
O
Impedance sensor value O: motor value/threshold/gain
r
Displays the reflected wave power
T
Displays TUNE current value
M
Displays MATCH current value
AMC
Select matching mode
AUTO: Set auto matching
MANU: Set manual matching
PRG
Selects the program number or displays the current value.