Alarm List
Alarm Number (4000 to 4999)
Alarm List-718
4359 CONVERTER ERROR Sub Code: Signifies the
physical No. of converter in
which the alarm occurred
Connection failure (1)Reset the alarm.
(2)If the alarm occurs again, check the connection and inserting state
of the following cables and connectors.
∙ EAXA21-CN507,510
∙ EAXB21-CN531,532,533
∙ Converter CN551,553
∙ EX1SV (External axis SERVO PACK)-CN591,592
Module failure (converter) (1)Reset the alarm.
(2)If the alarm occurs again, replace the converter.
EAXA21 board failure (1)Reset the alarm.
(2)If the alarm occurs again, replace the EAXA21 board. Save the
CMOS.BIN before replacing the board to be safe.
other If the alarm occurs again, save the CMOS.BIN in maintenance mode,
and then contact your Yaskawa representative about occurrence
status (operating procedure).
4360 WAFER ALIGNMENT
ERROR (SERVO)
Connection failure Check the connection of pre-aligner.
other If the alarm occurs again, save the CMOS.BIN in maintenance mode,
and then contact your Yaskawa representative about occurrence
status (operating procedure).
4362 POWER SUPPLY
READY ERROR
(SERVO)
Connection failure (1)Reset the alarm.
(2)If the alarm occurs again, check the connection and inserting state
of the following cables and connectors.
∙ EAXA21-CN501 to 506,CN510
∙ EAXB21-CN531,532,533
∙ Amplifier-CN581,582
∙ Converter-CN551,552A,552B
EAXA21 board failure (1)Reset the alarm.(In case of major alarm, turn the power OFF then
back ON.)
(2)If the alarm occurs again, replace the EAXA21 board. Save the
CMOS.BIN before replacing the board to be safe.
Software operation error
occurred
(1)Reset the alarm.
(2)If the alarm occurs again, save the CMOS.BIN in maintenance
mode, and then contact your Yaskawa representative about
occurrence status (operating procedure).
Alarm
Number
Alarm Name
Sub
Code
Meaning Cause Remedy
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