Zeiss EVO - Page 162

9 Technical Data and Conformity | 9.4 Performance Data and Specifications | EVO 15 ZEISS
Parameter Requirement
Less than 42dB for frequencies from 200 up to 300Hz
Less than 50dB for frequencies higher than 300Hz
Electron Optics
Parameter Description
SEM resolution EVO column at optimum working distance:
SE detector, W or LaB₆ filament:
§ 3nm at 30kV with W
2nm at 30kV with LaB₆
§ 3.4nm at 30kV, VP mode
§ 20nm at 1kV with W
15nm at 1kV with LaB₆
§ 8nm at 3kV
HDBSD detector and beam deceleration, W or LaB₆ filament
§ 6nm at 3kV
Magnification Range: <7x – 1,000,000x referenced to Polaroid 5" × 4.5" image for-
mat
Electron source Filament: W or LaB₆
Field of View § Maximum 6mm diameter
at the analytical working distance (AWD) of 8.5mm
§ Maximum40 mm diameter
at the longest working distance
X-ray analysis 8.5mm AWD and 35° take-off angle
Optibeam modes Resolution, Depth, Analysis, Field, Fisheye
Image framestore 32768×24576 pixel, signal acquisition by pixel, line and frame inte-
gration and averaging, including drift compensated frame averaging
(limitations may apply to averaging mode and maximum scan speed
for large images)
System control SmartSEM user interface operated by mouse and keyboard
Windows 10 multilingual operating system
Specimen Chamber
and Stage
Parameter Description
Specimen chamber
dimensions
§ 310mm inner diameter
§ 220mm height
Analytical working
distance
8.5mm
Specimen stage Type: 5-axes motorized Cartesian controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting: Drawer-type door
Movements:
§ X = 125mm
§ Y = 125mm
162 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006