Zeiss EVO - Page 163

ZEISS 9 Technical Data and Conformity | 9.4 Performance Data and Specifications | EVO 15
Parameter Description
§ Z = 50mm
§ T = −10° to 90°
§ R = 360° continuous
INFO: The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Specimen height: max. 145mm (with the ZTR module removed)
Specimen diameter: max. 250mm
Specimen weight:
Standard stage
§ 0.5kg (full motion)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Large Z stage (optional)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Specimen current monitor with integrated Touch Alarm (audible
touch alarm warning with on-screen message)
Specimen mounts: One 9x specimen holder for 13 mm diameter
stubs included in base tool configuration, various specimen holders
available as option
Vacuum range Vacuum modes
§ HV mode: lower than 2mPa (2×10⁻⁵mbar)
§ VP mode (optional): 10–400Pa
§ EasyVP mode (optional): 10–133Pa
§ EP mode (optional): 10–3000Pa
Detection System
Parameter Description
Chamber detectors SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400V
VPSE detector (optional) (only for VP mode):
Fourth generation variable pressure secondary electron detector for
imaging in VP mode with up to 85% improvement in Weber contrast
ratio
C2D detector (optional) (only for VP mode):
Cascade Current Detector with floating amplifier electronics, for en-
hanced imaging in Variable Pressure mode up to 133Pa. Delivers de-
tail at low kV for specimens that demand higher pressures, e.g. poly-
mers, bio specimens, pharmaceuticals, powders, and fibers. Enhanced
signal-to-noise ratio versus VPSE detector.
C2DX (optional) (only for VP mode):
Extended Cascade Current Detector
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 163