Zeiss EVO - Page 168

9 Technical Data and Conformity | 9.5 Performance Data and Specifications | EVO 25 ZEISS
Parameter Description
X-ray analysis 8.5mm AWD and 35° take-off angle
Optibeam modes Resolution, Depth, Analysis, Field, Fisheye
Image framestore 32768×24576 pixel, signal acquisition by pixel, line and frame inte-
gration and averaging, including drift compensated frame averaging
(limitations may apply to averaging mode and maximum scan speed
for large images)
System control SmartSEM user interface operated by mouse and keyboard
Windows 10 multilingual operating system
Specimen Chamber
and Stage
Parameter Description
Specimen chamber
dimensions
§ 310mm inner diameter
§ 220mm height
Analytical working
distance
8.5mm
Specimen stage Type: 5-axes motorized Cartesian controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting: Drawer-type door
Movements:
§ X = 130mm
§ Y = 130mm
§ Z = 50mm
80mm with large stage (option)
§ T = −10° to 90°
§ R = 360° continuous
INFO: The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Specimen height: max 210mm (with the ZTR module removed)
Specimen diameter: max. 300mm
Specimen weight:
Standard stage
§ 0.5kg (full motion)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Large Z stage (optional)
§ 2kg (not tilted)
§ 5kg (only XY motion)
Specimen current monitor with integrated Touch Alarm (audible
touch alarm warning with on-screen message)
Specimen mounts: One 9x specimen holder for 13mm diameter
stubs included in base tool configuration, various specimen holders
available as option
168 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006