Zeiss EVO - Page 167

ZEISS 9 Technical Data and Conformity | 9.5 Performance Data and Specifications | EVO 25
Parameter Requirement
Flow rate Approx. 3l/min for ventilation of specimen chamber with chamber
door open
Pressure 0.2–3.3bar
Quality 4.6 with nitrogen content > 99.996%
Connection hose 4mm inside diameter. 10m are delivered with the microscope.
Instrument con-
nection
Quick exchange connector. One is delivered with the microscope.
Compressed Air
Supply
Compressed air is used to operate several valves and the auto leveling system. The necessary com-
pressed air can be either generated by a compressor (part no. 345596-0000-000) or taken from a
gas cylinder or from an in-house supply system.
Environmental
Requirements
Parameter Requirement
Electrical field The microscope is a class A device (industrial). The microscope is de-
signed to operate in a controlled electromagnetic environment. This
means that devices with RF transmitters such as mobile phones or
DECT phones must not be used in close proximity.
Vibrations Less than 6μm/secrms from 0–30Hz
Less than 12μm/secrms above 30Hz
Magnetic stray
fields
Max. 3×10⁻⁷T (peak to peak) = 3mG (peak to peak)
Acoustic noise Less than 53dB for frequencies up to 200Hz
Less than 42dB for frequencies from 200 up to 300Hz
Less than 50dB for frequencies higher than 300Hz
Electron Optics
Parameter Description
SEM resolution EVO column at optimum working distance:
SE detector, W or LaB₆ filament:
§ 3nm at 30kV with W
2nm at 30kV with LaB₆
§ 3.4nm at 30kV, VP mode
§ 20nm at 1kV with W
15nm at 1kV with LaB₆
§ 8nm at 3kV
HDBSD detector and beam deceleration, W or LaB₆ filament
§ 6nm at 3kV
Magnification Range: <7x – 1,000,000x referenced to Polaroid 5" × 4.5" image for-
mat
Electron source Filament: W or LaB₆
Field of View § Maximum 6mm diameter
at the analytical working distance (AWD) of 8.5mm
§ Maximum45 mm diameter
at the longest working distance
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 167