Zeiss EVO - Page 94

5 First Operating Steps | 5.7 Working with Specific Specimen Types ZEISS
Pressure-limiting aperture Mid-column aperture
None (HV mode) 20μm or 30μm
400 μm EasyVP aperture 20μm or 30μm
100 μm VP aperture 750μm
Fig.42: 100μm VP aperture or 400 μm EasyVP aperture
Parts and Tools
 400μm EasyVP aperture (354720-1464-000)
 Alternatively: 100μm VP aperture (350700-0700-000)
 Aperture removal tool (350700-0692-000)
 VP aperture tool (350700-0859-000)
Prerequisite
ü
The microscope is equipped with the VP mode or EasyVP mode option.
Procedure
1. In the SEM Controls panel, select the Vacuum tab.
2. To vent the specimen chamber, click Vent.
3. If a lens-mounted BSD is fitted, remove the BSD
and place it in the parked position.
4. Retract all retractable detectors.
94 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006