Zeiss EVO - Page 99

ZEISS 5 First Operating Steps | 5.7 Working with Specific Specimen Types
Info
The 500µm beamsleeve allows EP pressures up to 3000Pa, but only 0.5mm maximum field
of view.
The 1000µm beamsleeve allows EP pressures up to 1000Pa, and 1mm maximum field of
view.
Fig.43: 100μm EP aperture and 500μm beamsleave aperture
Prerequisite
ü
The microscope is equipped with the EP mode option.
Procedure
1. In the SEM Controls panel, select the Vacuum tab.
2. To vent the specimen chamber, click Vent.
3. If a lens-installed BSD is fitted, remove the BSD
and place it in the parked position.
4. Retract all retractable detectors.
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 99