Edwards SCU-1601

SCU-1601 Control Unit for Turbomolecular Pump
MT-96E-1B1-0
Page 111
5
SERIAL COMMUNICATION PROTOCOL
Bit
Warning message
16-bits hex value
Remarks
0
WARNING: Bad Pump Transmit
0001
[System reservation]
1
WARNING: Second Damage Limit
0002
see 8.3.3
2
WARNING: First Damage Limit
0004
see 8.3.2
3
WARNING: Imbalance X_H
0008
see 8.3.4
4
WARNING: Imbalance X_B
0010
see 8.3.4
5
WARNING: Imbalance Z
0020
see 8.3.4
6
WARNING: Pump Run Time Over
0040
see 8.3.5
7
WARNING: Pump Overload
0080
see 8.3.6
8
WARNING: Pump record bungle
0100
[System reservation]
9
WARNING: PCB record bungle
0200
[System reservation]
10
WARNING: Low RTC Battery
0400
see 8.3.7
11
WARNING: Clock Data is Lost
0800
[System reservation]
12
WARNING: Recover by AUX Data
1000
[System reservation]
13
-
2000
[System reservation]
14
WARNING: Much MotorCurrent
4000
see 8.3.8
15
-
8000
[System reservation]
Table 28 - Warning value bit assign